We provides the highest quality refurbished spare parts available.

CVD Equipment

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Novellus Controllers (Exchange only)

Controller problems can be resolved before your equipment suffers any damage.

No Part Name Vendor Model Spec Status Photo
C01 ASSY,SYS CONT NOVELLUS 02-028522-00
P100/16MEG
-QNX2
-refurbished
used
C02 ASSY,MOD CONT NOVELLUS 02-034310-00
P100/16M
-QNX2
-refurbished
used
C03 ASSY,MOD CONT NOVELLUS 02-105005-00
P166,24V
-QNX2&4
-refurbished
used
C04 ASSY,MOD CONT NOVELLUS 02-113639-00
P166/64
-QNX2&4
-refurbished
used
C05 ASSY,MOD CONT NOVELLUS 02-127708-00
P166,+24V
-QNX2&4
-refurbished
used
C06 ASSY,MOD CONT NOVELLUS 02-128745-00
P166,+24V,W/8
-QNX2&4
-refurbished
used
C07 ASSY,MOD CONT NOVELLUS 02-132030-00
P166/64,QNX4
-QNX2&4
-refurbished
used
C08 ASSY,SYS CONT NOVELLUS 02-157568-00
P166 DUAL ETHER
-QNX2&4
-refurbished
used
C09 ASSY,SYS CONT NOVELLUS 02-157591-00
QNX4 DUAL ETHER
-QNX4
-refurbished
used
C10 ASSY,SYS CONT NOVELLUS 02-127707-00
P166/64,+24V
-QNX2&4
-refurbished
used
C11 ASSY,MC3E
MOD CONT
NOVELLUS 02-253704-00
ETHERNET
-QNX4
-Tested
used
C12 ASSY,MC3A
MOD CONT
NOVELLUS 02-253705-00
ARCNET
-QNX4
-Tested
used
C13 ASSY,MC3E
PLAT
NOVELLUS 02-257935-00
ETHERNET
-QNX4
-Tested
used
C14 ASSY,MC3A
FOR DLCM
NOVELLUS 02-272554-00
ARCNET
-QNX4
-Tested
used
C15 ASSY,MC3A
C2DLCM
NOVELLUS 02-267883-00
ARCNET
-QNX4
-Tested
used
Transfer Robot
No Part Name Vendor Model Spec Status Photo
R04 VacuTran
5
BROOKS Drive Unit,Arm Set,200mm -refurbished
-Novellus
used
R05 MagnaTran
7.1
BROOKS DRIVE UNIT, 27-262360-00 -refurbished
-Novellus
used
R06 MagnaTran
7.1
BROOKS ARM ASSY, 22-027510-00 -refurbished
-Novellus
used
E.P.D Controller
No Part Name Vendor Model Spec Status Photo
E01 VM3200 Verity Insturuments 1000389 Computer End Point Dual Head -refurbished
-Novellus
used
TEOS Controller
No Part Name Vendor Model Spec Status Photo
T01 270019800 Porter Insturument TEOS Controller -AsIs
-Novellus
used
CMP Part
No Part Name Vendor Model Spec Status Photo
Power Supply
No Part Name Vendor Model Spec Status Photo
P02 RF GEN AE GEN PDX-8000
27-278207-00
-AsIs- used
P03 RF GEN AE RFG-5500 RF GEN
27-115617-00
-AsIs used